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(PDF) Theoretical study of the mechanism of dry oxidation of 4H SiC
Effect of dry oxidation on the energy gap and chemical composition
Thermal oxidation - LNF Wiki
(a) An illustration of the oxidation process that produces a thin
nanoHUB.org - Resources: Dielectrics by Growth and Deposition: Watch
Growth rate of three different dry oxidation process incorporation of
nanoHUB.org - Resources: Dielectrics by Growth and Deposition: Watch